trip：800mm, speed：2000mm/s

accuracy：±0.04mm, load：3kg

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trip：2550mm, speed：1600mm/s

accuracy：±0.04mm, load：10kg

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trip：2550mm, speed：1600mm/s

accuracy：±0.04mm, load：10kg

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trip：3050mm, speed：2000mm/s

accuracy：±0.04mm, load：25kg

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